Disk-shaped substrate testing system, has suction unit arranged at side of housing and spaced from mounting plate, and opening provided in suction unit, where opening has width that corresponds to distance of plate to wall of housing

摘要

The system has a mounting plate (22) carrying a table that is movable in x and y directions. An air supply unit is arranged above a surface of a substrate and at a side of a housing. A suction unit (40) for air is arranged at the other side of the housing and is spaced from the plate. An opening is provided in the suction unit, where the opening has a width that corresponds to the distance of the plate to a wall of the housing.