Vacuum-generating apparatus and thin film processing apparatus having the same

摘要

A vacuum-generating apparatus includes a vacuum-generating unit and a stabilizing module. The vacuum-generating unit exhausts a fluid from a processing area to generate a vacuum pressure in the processing area. The stabilizing module is disposed between the processing area and the vacuum-generating unit, and the stabilizing module includes at least two curved fluid paths through which the fluid passes. The fluid is exhausted from the processing area through the curved fluid paths, to thereby improve uniformity of the vacuum pressure in the processing area.