| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acceleration sensor having high reliability and accuracy. <P>SOLUTION: An SOI wafer where two silicon substrates 10 and 20 are stuck to each other through an insulating layer 30 is etched, an opening 11 is disposed in the first silicon substrate 10, and respective regions of a peripheral fixed section 12, a weight fixed section 13, a beam section 14, and a stopper section 15 are thus formed. A second silicon substrate 20 is provided with a pedestal section 21 and a weight section 23 slightly thinner than the pedestal section. The insulating layer 30 except for connecting parts between the peripheral fixed section 12 and the pedestal section 21 and between the weight fixed section 13 and the weight section 23 is etched. By forming it in such a dimension that the weight section 23 overlaps the stopper section 15. Thus, the displacement by acceleration of the weight section 23 is restricted by the bottom of a vessel to which the stopper section 15 and pedestal section 21 are fixed. Thus, breakdown by excessive acceleration can be prevented. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
