| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vibrator with a desired characteristic by simple manufacturing steps, the vibrator manufactured by using this manufacturing method, and electronic equipment provided with the vibrator. SOLUTION: The manufacturing method includes: a first step of forming a first substrate 2 which is forme from a resin as a principal material and has a recessed part 21; and a second step in which a second substrate 3 is joined to the site except the recessed part 21 of the first substrate 2, and the second board 3 is subjected to etching to form a moving part 322 having a prescribed pattern in a region corresponding to the recessed part 21. COPYRIGHT: (C)2006,JPO&NCIPI
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