发明名称 |
Micro oscillating element |
摘要 |
A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
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申请公布号 |
US2006119216(A1) |
申请公布日期 |
2006.06.08 |
申请号 |
US20050271959 |
申请日期 |
2005.11.14 |
申请人 |
FUJITSU LIMITED |
发明人 |
KOUMA NORINAO;TSUBOI OSAMU;SONEDA HIROMITSU;UEDA SATOSHI;SAWAKI IPPEI |
分类号 |
G02B26/08;G02B26/00;H02N1/00 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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