PULSE MODULATOR, LITHOGRAPHY EQUIPMENT, AND DEVICE MANUFACTURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a pulse modulator for reducing change to the property of an incident radiation ray beam.

SOLUTION: There is provided a pulse modulator constituted such that the input pulse of radiation ray is received along a first optical axis and constituted such that one or more corresponding output pulses of the radiation ray are emitted along a second optical axis. The pulse modulator comprises a divider arranged along the first optical axis and constituted such that the input pulse is divided into a first pulse portion and a second pulse portion and the first pulse portion is conducted along the second optical axis, and first and second mirrors having a predetermined curvature radius, being arranged to face with each other with a predetermined separation space therebetween, and being constituted such that the second pulse portion is received and the second portion is turned along the second optical axis.

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