发明名称 THIN FILM DEVICE, ITS FABRICATION PROCESS, INTEGRATED CIRCUIT, MATRIX DEVICE, ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a technique for securing good bonding state between thin film element layers. SOLUTION: The thin film device comprises: a first thin film element layer (13); a second thin film element layer (23); a first terminal layer (15) including a first electrode terminal (16) formed between the first and second thin film element layers on the first thin film element layer side and connected electrically with the first thin film element layer, and a first nonconduction terminal (17) having a thickness substantially identical to that of the first electrode terminal and not connected electrically with the first thin film element layer; and a second terminal layer (25) including a second electrode terminal (26) formed between the first and second thin film element layers on the second thin film element layer side and connected electrically with the second thin film element layer, and a second nonconduction terminal (27) having a thickness substantially identical to that of the second electrode terminal and not connected electrically with the second thin film element layer. The first and second electrode terminals are bonded, and the first and second nonconduction terminals are also bonded. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006147711(A) 申请公布日期 2006.06.08
申请号 JP20040333374 申请日期 2004.11.17
申请人 SEIKO EPSON CORP;RIYUUKOKU UNIV 发明人 OKUYAMA TOMOYUKI;KIMURA MUTSUMI
分类号 H01L23/522;H01L21/02;H01L21/336;H01L21/768;H01L23/52;H01L27/00;H01L27/12;H01L29/786 主分类号 H01L23/522
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