| 摘要 |
PROBLEM TO BE SOLVED: To enable a stacked Josephson tunnel junction that uses magnesium boride to enable operation at higher temperatures. SOLUTION: After forming a superconductor layer 102 on a substrate 101, an aluminum film of about 1.4 nm thickness is formed on the superconductor layer 102 by evaporation method, using aluminum simplex as the source of evaporation. Then, by making the aluminum film into an oxidized state as a state such that oxygen gas is supplied on the aluminum film, a state is formed where a barrier layer 103 is formed on the superconductor layer 102. Thereafter, a superconductor layer 104 is formed on the barrier layer 103 by electron beam co-evaporation method that uses Mg and B complexes as individual sources of evaporation. COPYRIGHT: (C)2006,JPO&NCIPI
|
