| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light emitting element excellent in a light extraction efficiency and to realize a low cost, an improvement in yield and a high efficiency. <P>SOLUTION: The light emitting element is made by sequentially laminating a first clad layer, an active layer and a second clad layer in this order. The second clad layer has a grown pit formed in the front surface at the time of growth, and a thickness of 100 nm or more. Moreover, the thickness of the second clad layer is set to become λ/2n or more wherein a luminescence wavelength in vacuum is λ and the refractive index of the second clad layer is set to n. In the case of a vapor phase epitaxy of the second clad layer, the growth pit is formed in the front surface using the growth temperature as 1,000°C or less, and the vapor phase epitaxy is performed until the thickness is set to 100 nm or more. Moreover, the vapor phase epitaxy of the hydrogen is performed in an atmosphere including a hydrogen. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
