<p>An exposure device applies an exposure light to a substrate (P) via a projection optical system (PL) so as to expose the substrate (P). The projection optical system (PL) includes a first optical element (LS1) nearest to the image plane of the projection optical system (PL) and a second optical element (LS2) arranged near to the image plane next to the first optical element (LS1). The exposure device further includes a second collection opening (42) arranged at a position higher than a lower surface (T3) of the second optical element (LS2) for collecting second liquid (LQ2) contained in a second space (K2) between an upper surface (T2) of the first optical element (LS1) and the lower surface (T3) of the second optical element (LS2).</p>
