OPTICAL MICROSCOPE INCLUDING Z-AXIS STAGE AND PIEZOELECTRIC ACTUATOR FOR RECTILINEAR TRANSLATION OF Z STAGE

摘要

A stage assembly mountable on an optical microscope for orienting a sample into a desired focal position includes an X-axis plate operable for rectilinear shifting in the X-axis direction and a Y-axis plate mounted on the X-axis plate operable for rectilinear translation in the Y-axis direction. A Z-axis plate is mounted on the XY plate assembly for carrying a sample to be investigated and a piezoelectric actuator mechanism is interposed between the XY plate assembly and the Z-axis plate operable for rectilinear translation of the Z-axis plate.