PROCESSING METHOD, PROCESSING APPARATUS AND FINE STRUCTURE MANUFACTURED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a processing method capable of easily forming highly precise, ultrafine through holes in a plastic thin film and giving a low manufacturing cost. SOLUTION: The processing method, which forms fine through holes in a plastic thin film, comprises the step wherein the plastic thin film is set between a pressing mold and an oppositely facing base material; the step wherein the plastic thin film is heated between the pressing mold and the oppositely facing base material to the flow starting temperature of the plastic or higher; and the step wherein the plastic thin film showing the flow starting temperature or higher is pressurized between the pressing mold and the oppositely facing base material to form the through holes. COPYRIGHT: (C)2006,JPO&NCIPI