| 摘要 |
An apparatus for fabricating a nano/micro structure is provided in the present invention. The apparatus includes a chamber having a separation device for separating the chamber into a first subchamber and a second subchamber, a dispersion device connected to the first subchamber, an optical driving device disposed next to the first chamber and outside the chamber and an alignment device disposed on the separation device for connecting the first subchamber and the second subchamber. Through the present invention, a plurality of particles are dispersed in the first subchamber via the dispersion device, and further driven and guided to a substrate provided in the second subchamber via the optical driving device and the dispersion device, so that a three-dimensional nano/micro structure on the substrate quickly and precisely.
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