Atmospheric pressure plasma system

摘要

An atmospheric pressure plasma system ( 1 ) sharing electrodes ( 4 ) defining a plasma region ( 5 ) mounted in an enclosure housing ( 2 ). The enclosure housing has an open to atmosphere entry port assembly ( 10 ) and exit port assembly ( 11 ) for the continuous transfer of work-pieces through the plasma region ( 5 ). The embodiment illustrated is for precursor process gases having a relative density less than that of the ambient air so that the precursor gases rise in the enclosure housing ( 2 ) expelling the heavier ambient and exhaust gases. Where the gases have a relative density greater than ambient the port assemblies ( 10 and 11 ) are sited above the plasma region ( 5 ).