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发明名称
ANTI-REFLECTIVE COATING COMPOSITIONS FOR USE WITH LOW k DIELECTRIC MATERIALS
摘要
申请公布号
EP1567288(A4)
申请公布日期
2006.06.07
申请号
EP20030787250
申请日期
2003.12.02
申请人
BREWER SCIENCE, INC.
发明人
PULIGADDA, RAMA;LAMB, JAMES, E.;FLAIM, TONY, D.
分类号
H01L21/312;B05D3/02;B32B17/10;C08F20/26;C08F20/32;C08F220/28;C08G59/32;C08J7/04;C09D163/00;G03F7/09;G03F7/11;H01L;H01L21/027;H01L21/311;(IPC1-7):B05D3/02;B05D1/00
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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