发明名称 |
System for detecting metal content on a semiconductor surface and method of operating the same |
摘要 |
An apparatus for detecting the presence of metal material in a semiconductor wafer. The apparatus comprises: (i) a current-carrying coil for generating a first magnetic field, wherein the first magnetic field is capable of causing the metal material in the semiconductor wafer to generate an opposing magnetic field; and (ii) a detection circuit for detecting the opposing magnetic field generated by the metal material when the semiconductor wafer is in proximity to the current-carrying coil.
|
申请公布号 |
US7057386(B1) |
申请公布日期 |
2006.06.06 |
申请号 |
US20040027774 |
申请日期 |
2004.12.31 |
申请人 |
NATIONAL SEMICONDUCTOR CORPORATION |
发明人 |
FRANKLIN ANGELA G. |
分类号 |
G01R33/12;G01N27/72;G01V3/15 |
主分类号 |
G01R33/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|