发明名称 Micro-structures with individually addressable ribbon pairs
摘要 An optical MEM devices which utilizes individually addressable ribbon pairs configured to modulate light is disclosed. The ribbon pairs preferably comprise silicon nitride with a reflective aluminum layers, wherein at least one ribbon from each ribbon pair is in electrical communication with a driver circuit for controllably addressing the ribbon pairs individually. The ribbons are preferably configured to modulate light having wavelengths in a range of 0.4 to 2.0 microns suitable for display and optical communication technologies. The system preferably comprises optical fibers for transmitting light to individually addressable ribbon pairs and for transmitting reflected light from individually addressable ribbon pairs.
申请公布号 US7057795(B2) 申请公布日期 2006.06.06
申请号 US20020225370 申请日期 2002.08.20
申请人 SILICON LIGHT MACHINES CORPORATION 发明人 HUNTER JIM;AMM DAVID;GUDEMAN CHRISTOPHER
分类号 G02B26/00;G02B5/18;G02B26/08 主分类号 G02B26/00
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