COMPUTER-IMPLEMENTED METHODS FOR GENERATING INPUT FOR A SIMULATION PROGRAM FOR GENERATING A SIMULATED IMAGE OF A RETICLE
摘要
Various computer-implemented methods are provided. One computer-implemented method for generating input for a simulation program includes combining information about a defect detected on a partially fabricated reticle with information about phase assigned to an area of the reticle proximate to the defect. The phase is to be added to the reticle on a level other than a level on which the defect is formed. The defect is detected on the reticle prior to addition of the phase to the reticle. Another computer-implemented method includes generating a simulated image of a defect on a reticle using information about the defect generated by inspection of one level of the reticle in combination with information about a different level on the reticle.
申请公布号
WO2006019919(A3)
申请公布日期
2006.06.01
申请号
WO2005US25003
申请日期
2005.07.14
申请人
KLA-TENCOR TECHNOLOGIES CORP.;ZURBRICK, LARRY, STEVEN;LEHON, HAROLD, WILLIAM