| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of easily performing measurement of small angle scattering, X-ray diffraction, or reflectance by use of one apparatus. SOLUTION: The apparatus for analysis of a sample includes a radiation source, which is adapted to direct a converging beam of X-rays toward a surface of the sample and to direct a second collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processing part receives and processes output signals from the detector assembly so as to determine a characteristic of the sample. COPYRIGHT: (C)2006,JPO&NCIPI
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