发明名称 Near single-crystalline, high-carrier-mobility silicon thin film on a polycrystalline/amorphous substrate
摘要 A template article including a base substrate including: (i) a base material selected from the group consisting of polycrystalline substrates and amorphous substrates, and (ii) at least one layer of a differing material upon the surface of the base material; and, a buffer material layer upon the base substrate, the buffer material layer characterized by: (a) low chemical reactivity with the base substrate, (b) stability at temperatures up to at least about 800° C. under low vacuum conditions, and (c) a lattice crystal structure adapted for subsequent deposition of a semiconductor material; is provided, together with a semiconductor article including a base substrate including: (i) a base material selected from the group consisting of polycrystalline substrates and amorphous substrates, and (ii) at least one layer of a differing material upon the surface of the base material; and, a buffer material layer upon the base substrate, the buffer material layer characterized by: (a) low chemical reactivity with the base substrate, (b) stability at temperatures up to at least about 800° C. under low vacuum conditions, and (c) a lattice crystal structure adapted for subsequent deposition of a semiconductor material, and, a top-layer of semiconductor material upon the buffer material layer.
申请公布号 US2006115964(A1) 申请公布日期 2006.06.01
申请号 US20040001461 申请日期 2004.11.30
申请人 FINDIKOGLU ALP T;JIA QUANXI;ARENDT PAUL N;MATIAS VLADIMIR;CHOI WOONG 发明人 FINDIKOGLU ALP T.;JIA QUANXI;ARENDT PAUL N.;MATIAS VLADIMIR;CHOI WOONG
分类号 B32B13/04;B32B15/04;H01L21/20 主分类号 B32B13/04
代理机构 代理人
主权项
地址