摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter array having simplified manufacturing steps, particularly a method for manufacturing the color filter array substrate provided with an overcoat layer having a flat surface, and to provide a thin film patterning apparatus capable of performing the patterning step without using a photolithography step and capable of simplifying the manufacturing step and a method for manufacturing the color filter array substrate utilizing the same. <P>SOLUTION: The method for manufacturing the color filter array substrate includes: a step for forming a black matrix 102 on the substrate; a step for forming red, green, and blue color filters 104R, 104G, and 104B on the substrate on which the red, green, and blue color filters are formed; a step for forming the overcoat layers including a white color filter 104W on the substrate on which the red, green, and blue color filters 104R, 104G, and 104B are formed; a step for aligning a flat plate soft mold to the overcoat layer; and a step for planarizing the overcoat layer utilizing the flat plate soft mold. <P>COPYRIGHT: (C)2006,JPO&NCIPI |