摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conduction structure of a piezoelectric vibrator used for a piezo-electric device, such as an ultrasonic motor and to provide the shape of a conduction pattern which will not affect, particularly the vibration of an oscillating object, and to provide a method of manufacturing. <P>SOLUTION: In an ultrasonic motor which has the oscillating object, having a piezo-electric element and a conduction pattern for supplying a drive signal to the piezo-electric element and which is friction driven by the vibration of the oscillating object, the conduction pattern has a structure, having a cushion part which has a shape which projects from a straight line which connects the fixed end to which the piezo-electric element, the jointing section of the conduction pattern, the conduction pattern, and the conduction pattern are fixed. <P>COPYRIGHT: (C)2006,JPO&NCIPI |