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发明名称
Metal gate of semiconductor and fabrication method thereof
摘要
申请公布号
KR100585109(B1)
申请公布日期
2006.06.01
申请号
KR20030081741
申请日期
2003.11.18
申请人
发明人
分类号
H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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