UNIPOLAR ELECTROSTATIC QUADRUPOLE LENS AND SWITCHING METHODS FOR CHARGED BEAM TRANSPORT,申请号EP20040783034-传众专利搜索

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发明名称	UNIPOLAR ELECTROSTATIC QUADRUPOLE LENS AND SWITCHING METHODS FOR CHARGED BEAM TRANSPORT
摘要
申请公布号	EP1661155(A2)	申请公布日期	2006.05.31
申请号	EP20040783034	申请日期	2004.09.02
申请人	AXCELIS TECHNOLOGIES, INC.	发明人	DIVERGILIO, WILLIAM;HUANG, YOUNGZHANG
分类号	H01J37/12;H01J37/153;H01J37/317;(IPC1-7):H01J37/317	主分类号	H01J37/12
代理机构		代理人
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