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发明名称
apparatus for cleaning in a semiconductor fabricating
摘要
申请公布号
KR100584778(B1)
申请公布日期
2006.05.29
申请号
KR20000061095
申请日期
2000.10.17
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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