| 摘要 |
<p>In a treatment liquid supply apparatus, a chemical liquid and pure water are mixed with each other in a mixing portion to prepare a treatment liquid thereby, which is supplied to a substrate as an object to be treated. By means of a constant-flow pump provided in a chemical liquid supply tube, a flow rate of the chemical liquid flowing into the mixing portion is controlled. By means of constant-flow valves provided in treatment liquid supply tubes respectively, flow rates of the treatment liquid flowing from treatment liquid supply portions to the substrate are controlled. Due to this control, a concentration of the chemical liquid in the treatment liquid is controlled to a predetermined value.</p> |
