| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring mirror eccentricity and surface irregularities of polygon mirror motor and capable of measurement even for a non-cylindrical measurement object, and capable of measuring high speed rotation up to several ten thousands r.p.m. SOLUTION: This device is provided with a first light source 4, a first light detection element 7 for detecting the first reflection light reflected at the mirror to be measured from the first light source 4 and a first slit 6, a first optical system 5 for making a spot on the optical detection element 7, a second light source 8, a second light detection element 11 for detecting the second reflection light from the second light source 8 and a second reflection light during normally positioning when the light from the second light source 8 is perpendicular to the mirror surface, a second optical system 9 and a second slit 10, a time measurement means for measuring the time interval of the output signals between the first light detection element 7 and a second light detection element 11 for every mirror face, a mirror eccentricity measurement means for calculating the mirror eccentricity, and a surface irregularities calculation means for calculating the surface irregularities based on the time interval value. COPYRIGHT: (C)2006,JPO&NCIPI |
