发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device for enabling ultra-fine processing of fins, and also to provide a method for manufacturing the same. SOLUTION: The semiconductor device comprises first and second fins 101a formed with semiconductor layers provided oppositely with each other on a semiconductor substrate 200, an active region 101b provided connected with the first and second fins to supply the predetermined voltage to the first and second fins, and gate electrodes 121, 122 provided across the first and second fins at the location keeping the predetermined interval to the active region on a insulating film 114 formed on the semiconductor substrate. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006135067(A) 申请公布日期 2006.05.25
申请号 JP20040322206 申请日期 2004.11.05
申请人 TOSHIBA CORP 发明人 YAGISHITA JUNJI
分类号 H01L21/336;H01L29/78;H01L29/786 主分类号 H01L21/336
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