摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a substrate having an insulating film, capable of sufficiently covering the substrate with the insulating film. SOLUTION: The polymer is obtained by polycondensing a compound selected from a group consisting of silane compounds represented by formula (1) (wherein R<SP>1</SP>is a hydrogen atom, a 1-4C alkyl group or a 6-20C aryl group; R<SP>2</SP>is a 1-4C alkyl group or a 6-20C aryl group; R<SP>3</SP>is a 1-4C alkyl group or a 6-20C aryl group; R<SP>4</SP>is a 1-4C alkyl group, a 1-4C acyl group or a 6-20C aryl group; X is a divalent group; m is 2 or 3), formula (2) (wherein R<SP>3</SP>, R<SP>4</SP>, X and m are each the same as mentioned above; R<SP>5</SP>is a hydrogen atom or monovalent organic group; R<SP>6</SP>is monovalent organic group) and formula (3) (wherein R<SP>3</SP>, R<SP>4</SP>, X and m are each the same as mentioned above; R<SP>7</SP>is a 3-8C alkylene group). The method for producing the substrate having the insulating film comprises a step for producing an adhesion layer by applying a composition for formation of the adhesion layer containing an organic solvent onto the substrate and heating the composition and a step for forming an insulating film by applying a composition for formation of the insulating film onto the adhesion layer and heating the composition. COPYRIGHT: (C)2006,JPO&NCIPI
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