| 摘要 |
PROBLEM TO BE SOLVED: To provide a nonwoven polishing cloth which is excellent in heat generation control effect during execution of polishing work, and does not produce a smear even in the case of dry polishing. SOLUTION: The nonwoven polishing cloth is formed of a nonwoven fabric which is formed of fibers arranged at random, an adhesive bonded to a surface of each fiber forming the nonwoven fabric, and a reactive inorganic heat absorbing material bonded to the nonwoven fabric by the adhesive. COPYRIGHT: (C)2006,JPO&NCIPI
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