| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an easy manufacturing method of a light guide module and an optoelectric hybrid device, and also provide a highly reliable light guide module and an optoelectric hybrid device realized by this manufacturing method. <P>SOLUTION: This manufacturing method of a light guide module has a step of forming a light guide layer 3 on a silicon substrate 2, a step of forming a recess 6 by partly removing the light guide layer 3, and a step of forming a photodetector constituting layer in the recess 6. The light guide module 1 is obtained by this manufacturing method. The manufacturing method of an optoelectric hybrid device forms a semiconductor layer 13 on a substrate 2 including a light guide layer 3 and a photodetector 4 through an insulation film 12 in a light guide module 1 obtained by the above manufacturing method. The optoelectric hybrid device 14 is obtained by this manufacturing method. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
