| 摘要 |
PROBLEM TO BE SOLVED: To provide an anodic chemical conversion method and an apparatus therefor in which a substrate to be treated is almost horizontally held. SOLUTION: A silicon wafer is almost horizontally placed, and utilizing its buoyancy, the silicon wafer is floated on an electrolytic solution. An edge is formed of an expansive and corrosion resistant material on the outer circumference of the silicon wafer, and the edge is floated on the electrolytic solution. Further, a liquid reservoir is made also inside the edge, and an electrode is floated thereon, and is used as an anode side. In this state, anodic reaction is performed, thus the face in contact with the liquid is chemically converted, and the upper side functions as a current feed face. Both anode and cathode are arranged utilizing the buoyancy of the electrode material via the liquid and play roles as current feed and electrode holding. COPYRIGHT: (C)2006,JPO&NCIPI
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