| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for manufacturing an organic EL element extremely superior in productivity and cost performance, in which downsizing of a display panel of organic EL element (OLED) can be realized, high reliability can be secured, and by improving the rate of operation of the device, running cost can be reduced. <P>SOLUTION: The device manufactures the organic EL element in which a sealing film 13 for sealing a light emitting part 12 is formed on the light emitting part 12 which is formed by laminating in order a positive electrode 12a, an organic light emitting layer 12b laminating at least one layer or more of organic material layers, and a negative electrode 12c. The device is provided with a sealing film forming mechanism which laminates and forms the sealing film 13 on almost whole surface of the substrate 11 and a film removing mechanism which irradiates ion beams on a part of the sealing film 13 or the organic material layer laminated on the substrate 11 and removes part of the sealing film 13 or the organic material layer on the substrate 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
