| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner and a packaging method of the aligner capable of reducing costs associated with packaging, transportation, and installation of the aligner and of rapidly building up aligner after the installation. <P>SOLUTION: A second partial illumination optical system IOP2 supported on a top plate 21 of an aligner body is configured in such a way that housings 26, 27 are mounted on a fixed top plate 21A while housings 28, 29 are mounted on a movable top plate 21B. The movable top plate 21B is supported rotatably with respect to the fixed top plate 21A, and is rotated at the time of packaging the exposing apparatus from a first position protruded outward from the aligner body to a second position not protruded. At the second position a relative position relation with respect to the fixed top plate 21A is kept to be incapable of being displaced by fixed members 79, 80. In this state, the second partial illumination optical system IOP2 is packaged in the same packaging case together with the aligner body. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
