| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam source for an electron-optical apparatus such as an electron microscope, using a nano electron source which can be easily regenerated or restored, has a long life, has good controllability and can prepare a microstructure. <P>SOLUTION: A second metal, such as palladium or platinum, is deposited using its vapor on a clean tip surface of a first metal base, such as tungsten, having a needlelike shape, and is heated to a temperature in the range of 800-1,200°C. Thereby, a nano pyramid having several nm dimensions is grown up and the microstructure with a tip terminated with one or several atoms can be obtained. This has high directivity, high luminance and high coherence as a point light source, and a lifetime of the electron source exceeds 300 hours because the structure can be regenerated by heating even in case that the nano pyramid is destroyed by ion bombardments or ion adsorptions. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
