| 摘要 |
PROBLEM TO BE SOLVED: To provide the manufacturing method of a silicon boat where metal contamination is not accumulated as a high temperature heat treatment boat. SOLUTION: Grinding fluid comprising 10% or above ozone water or oxygenated water is supplied during a machining process and a grinding process such as cutting or grinding of a boat substrate. Thus, an oxide film is formed on the surface of the substrate and the oxide film is removed by HF cleaning. COPYRIGHT: (C)2006,JPO&NCIPI |
