发明名称 |
Absorption type multi-layer film ND filter |
摘要 |
In an absorption type multi-layer film ND filter having a thin substrate and provided thereon first and second absorption type multi-layer films which attenuate transmitted light, the first and second absorption type multi-layer films are constituted of multi-layer films each consisting essentially of dielectric layers formed of SiO<SUB>2</SUB>, Al<SUB>2</SUB>O<SUB>3 </SUB>or a mixture of these and metal film layers formed of Ni alone or an Ni alloy; the layers being alternately layered on the substrate; and the first and second absorption type multi-layer films are so formed on one side and the other side, respectively, of the substrate as to have a film structure in which they are symmetrical to each other interposing the substrate between them, and the warpage of the substrate has been controlled at a curvature of radius of 500 mm or more.
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申请公布号 |
US2006110587(A1) |
申请公布日期 |
2006.05.25 |
申请号 |
US20050229305 |
申请日期 |
2005.09.19 |
申请人 |
SUMITOMO METAL MINING CO., LTD. |
发明人 |
OKAMI HIDEHARU;ABE YOSHIYUKI;NAKAYAMA TOKUYUKI |
分类号 |
B32B7/02;B32B15/04;B32B17/06 |
主分类号 |
B32B7/02 |
代理机构 |
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地址 |
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