发明名称 |
Sensing alignment of multiple layers |
摘要 |
Using an imaging system in relation to a plurality of material layers in an initial alignment state is provided, a first of the plurality of material layers at least partially obscuring a second of the plurality of material layers in the initial alignment state. The first material layer is moved from a first position corresponding to the initial alignment state to a second position out of a field of view of the imaging system, and a first image of the second material layer is stored. The first material layer is moved back the first position to restore the initial alignment state. A second image of the first material layer is acquired. The second image and the stored first image are processed to determine the initial alignment state.
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申请公布号 |
US2006110069(A1) |
申请公布日期 |
2006.05.25 |
申请号 |
US20040995837 |
申请日期 |
2004.11.23 |
申请人 |
TONG WILLIAM M;WU WEI;GAO JUN;PICCIOTTO CARL E |
发明人 |
TONG WILLIAM M.;WU WEI;GAO JUN;PICCIOTTO CARL E. |
分类号 |
G06K9/32;G06K9/36 |
主分类号 |
G06K9/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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