| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-directional observation apparatus capable of simply observing the same object to be observed from a plurality of directions of different optical path lengths with simple constitution. SOLUTION: The multi-directional observation apparatus is provided with: an illumination device that illuminates an object W to be observed with illumination light; an imaging means 3 that images reflection light from the object W; a plurality of optical path setting members 5 that form optical paths of different optical path length for observing the object W from different directions between the imaging means 3 and the object W; an image forming optical system 4 that forms an image of the focal position on each optical path on the imaging means 3; and a switching mechanism 6 capable of selectively attaching and detaching the optical path setting members 5 between the object W and the image forming optical system 4. Therein, a focal position correction means that allows air-equivalent lengths of a plurality of the optical paths to coincide with one another is disposed on the optical path setting member 5. COPYRIGHT: (C)2006,JPO&NCIPI |
