| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid feeding device suppressing air content in liquid low, enabling accurate pressurizing of the liquid, thereby enabling stable application of liquid at a liquid application part. SOLUTION: This liquid feed device 10 is provided with a flexible bag member 1, a rigid liquid storage tank 2, a liquid discharge port 3, a pressure applying port 5, and a pressure applying device 7, etc. The pressure supplying port 5 is provided to the upper face of the tank 2, and the liquid discharge port 3 is provided to the bottom of the tank 2. The bag member 1 is disposed inside the tank 2 and connected to the pressure supplying port 5. The pressure applying device 7 applies pressure to the inside of the bag member 1 from the pressure supplying port 5. Liquid 8 is filled between the inner wall of the liquid storage tank 2 and the outer surface of the bag member 1, and is supplied to a spin coat (not shown in Figure) via the liquid discharge port 3 by varying the air pressure in the bag member 1. COPYRIGHT: (C)2006,JPO&NCIPI |
