| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute pattern correction method capable of preventing generation of minute cracks. SOLUTION: A correction paste 21 is coated on a rib chip defect 85 generated to a rib 83 formed on a surface of a glass substrate 80, and laser spot 31 is moved along the longitudinal direction of a correction portion 30 made of the coated correction paste 21, and the correction portion 30 is calcined. Thereby, in the correction portion 30, the stresses generated in the portion irradiated with laser beam is released to the portion which is not irradiated by laser beam, and a large stress will not be generated. COPYRIGHT: (C)2006,JPO&NCIPI
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