| 摘要 |
PROBLEM TO BE SOLVED: To efficiently produce an AlN powder having a small average particle size, a small specific surface area and a low oxygen content. SOLUTION: In a production method of the aluminum nitride powder, a mixed powder containing 100 pts.wt. aluminum nitride raw material powder and 0.01-15 pts.wt. carbonaceous substance is subjected to a first heat-treatment at 1,400-1,600°C in a non-oxidative atmosphere with a carbon dioxide gas concentration of 0-10 vol.% and subsequently to a second heat-treatment at 500-800°C in an oxidative atmosphere. COPYRIGHT: (C)2006,JPO&NCIPI
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