| 摘要 |
An object of the present invention is to provide means for accurately obtaining very small quantity of wear of the order of nanometers of a protective film on the surface of a sliding member. In a method of measuring a quantity of wear on the surface of a measurement sample comprising a base and a coating layer, a spectrum of the surface of a reference sample is made, using a surface-element analysis device which analyzes elements on the surface of a substance from an energy spectrum of charged particles which is obtained by applying excited ionization radiation on the reference sample equivalent to the measurement one and by measuring charged particles generated from the surface of the substance. A step of obtaining signal intensity ratios of plural elements from the spectrum is repeated a plurality of times while the surface of the reference sample is being etched and calibration curves which indicates a distribution of the signal intensity ratios of the plural elements in the reference sample are made. Subsequently, an energy spectrum of charged particles from the surface of the measurement sample is measured, signal intensity ratios of specific elements are calculated, and the obtained ratios are compared with the calibration curves to decide a quantity of wear of the measurement sample.
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