| 摘要 |
<p>A positioning apparatus includes: a stage (20) having a flat placement surface (22a) on which a thin plate (10) is mounted. The placement surface (22a) has a flat region which is slightly larger than that of the thin plate (10). The placement surface also has lateral side edges (22). An optical detecting means (50) is arranged above the stage (20) for detecting a mark (18) provided on the thin plate (10) and has such a view that the mark (18) can be detected if the thin plate is placed accurately on the placement surface (22a), but which cannot be detected if the thin plate (10) protrudes from the region of the placement surface. A movable part (30) pushes the thin plate (10) to centre it on the placement surface (22a). The movable part (30) moves until it comes into contact with the lateral edge (22). <IMAGE></p> |
