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发明名称
摘要
申请公布号
JP3778443(B2)
申请公布日期
2006.05.24
申请号
JP20020316973
申请日期
2002.10.31
申请人
发明人
分类号
C23C14/14;G02F1/1343;C22C5/06;C23C14/34;H01B1/02;H01L21/285
主分类号
C23C14/14
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