| 摘要 |
Embodiments of the invention provide methods for enhancing the downstream product yield without significantly affecting the yield of components from which downstream products are made or enhancing yield of the components without significantly affecting the downstream product yield and performance. In one embodiment, a method comprises obtaining a failure rate of the downstream manufacturing process as a function of each of a plurality of component performance parameters of the current manufacturing process of the component; optimizing weighted factors based on correlation between the current manufacturing process of the component and the downstream product, the weight factors each corresponding to one of the plurality of component performance parameters; and calculating figure of merits (FOM) with respect to the plurality of component performance parameters of the current manufacturing process of the component, the FOM including the weighted factors.
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