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发明名称
Method for Forming Capacitor of Semiconductor Device
摘要
申请公布号
KR100583118(B1)
申请公布日期
2006.05.23
申请号
KR20030093920
申请日期
2003.12.19
申请人
发明人
分类号
H01L27/108;H01L21/02;H01L21/8242
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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