发明名称 PROCESS AND ARRANGEMENT FOR THE SELECTIVE METALLIZATION OF 3D STRUCTURES
摘要 <p>Process for selectively metallizing, especially gold-plating, three dimensional structures on wafers, such as contact bumps comprises partially immersing the structures (1) on the wafer (2) in an electrolyte (12) with current or potential control. An Independent claim is also included for a device for carrying out the process.</p>
申请公布号 KR100581784(B1) 申请公布日期 2006.05.23
申请号 KR20030060825 申请日期 2003.09.01
申请人 发明人
分类号 H01L23/48;H01L21/60;H01L23/485 主分类号 H01L23/48
代理机构 代理人
主权项
地址