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发明名称
FILM STICKING METHOD AND FILM STICKING DEVICE
摘要
申请公布号
KR20060050896(A)
申请公布日期
2006.05.19
申请号
KR20050080981
申请日期
2005.08.31
申请人
TOKYO SEIMITSU CO., LTD.
发明人
AMETANI MINORU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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