发明名称 SEMICONDUCTOR INTEGRATED DEVICE, DESIGNING METHOD AND DEVICE THE SAME, STORAGE MEDIUM OF PROGRAM AND MANUFACTURING METHOD AND DEVICE OF THE SEMICONDUCTOR INTEGRATED DEVICE
摘要 Semiconductor integrated circuit that prevents breakdown and degradation of a gate oxide film caused by charge-up in manufacturing steps thereof is provided. The circuit includes a gate 12 provided insulated from a transistor diffusion layer 11, wirings 13 and 14 connected to the gate 12, a wiring 15 parallel to and adjacent to the wiring 13, and a wiring 16 connected to the wiring 15. The gate area of the gate 12 is indicated by G_Area, and the gate capacitance of the gate 12 is indicated by G_Cap. The areas of the wirings 13, 14, 15, and 16 are indicated by MG1_Area, MG2_Area, M1_Area, and M2_Area, respectively, and a parasitic capacitance between the wirings 13 and 15 is indicated by M1_Cap. An antenna ratio R1 calculated from the areas is given by an equation R1={(MG1_Area+MG2_Area)+alpha(M1_Area+M2_Area)}/G_Area. alpha is a parameter determined by a function of the G_Cap and the M1_Cap. Layout of the wirings is performed so that a relation R1<L1 (which is a specified value that causes damage to a gate oxide film).
申请公布号 KR20060052311(A) 申请公布日期 2006.05.19
申请号 KR20050102263 申请日期 2005.10.28
申请人 NEC ELECTRONICS CORPORATION 发明人 FURUKI TSUTOMU
分类号 H01L21/336;H01L27/02 主分类号 H01L21/336
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